Fabrication of alignment structures for a fiber resonator by use of deep-ultraviolet lithography

Liu, Xiyuan ; Brenner, Karl-Heinz ; Wilzbach, Marco ; Schwarz, Michael ; Fernholz, Thomas ; Schmiedmayer, Jörg

Document Type: Article
Year of publication: 2005
The title of a journal, publication series: Applied Optics
Volume: 44
Issue number: 32
Page range: 6857-6860
Place of publication: Washington, DC
Publishing house: OSA
ISSN: 0003-6935 , 2155-3165 , 1539-4522
Publication language: English
Institution: School of Business Informatics and Mathematics > Optoelektronik (Brenner 1999-2008)
Subject: 004 Computer science, internet
Abstract: We present a novel method to mount and align an optical-fiber based resonator on the flat surface of an atom chip with ultrahigh precision. The structures for mounting a pair of fibers, which constitute the fiber resonator, are produced by a spin-coated SU-8 photoresist technique by use of deep-UV lithography. The design and production of the SU-8 structures are discussed. From the measured finesses we calculate the coupling loss of the SU-8 structures are acting as a kind of fiber splice to be smaller than 0.013 dB.

Dieser Eintrag ist Teil der Universitätsbibliographie.

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