Realization of refractive continuous phase elements with high design freedom by mask structured ion exchange

Bähr, Jochen ; Brenner, Karl-Heinz

Document Type: Conference or workshop publication
Year of publication: 2001
Book title: Gradient index, miniature, and diffractive optical systems II : 2 - 3 August 2001, San Diego, USA
The title of a journal, publication series: Proceedings of SPIE
Volume: 4437
Page range: 50-60
Publisher: Suleski, Thomas J.
Place of publication: Bellingham, Wash.
Publishing house: SPIE
ISBN: 0-8194-4151-1
Publication language: English
Institution: School of Business Informatics and Mathematics > Optoelektronik (Brenner 1999-2008)
Subject: 004 Computer science, internet
Keywords (English): continuous phase , integration , ion exchange process , micro optics , refractive optics
Abstract: We suggest a new technique for fabricating a wide class of continuous refractive optical elements in glass by combining the technique of ion exchange with high precision structuring of metal masks. We call this technique mask structured ion exchange (MSI). We have demonstrated the potential of this method by fabrication of rectangular shaped microlenses with low numerical aperture for Hartmann-Shack wavefront sensing applications. The lenses, positioned on a 400 µm raster, had a fill factor of 100 %, a focal length of 33 mm and diffraction limited performance. Due to the special fabrication conditions, the lens shape, position and even the focal length can be varied spatially within one substrate. For realization of a high aperture microlens array by field assisted exchange process we could reduce proximity effects between adjacent mask apertures by MSI.

Dieser Eintrag ist Teil der Universitätsbibliographie.

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