Fabrication of integrated structures for coupling VCSEL to fibre

Wohlfeld, Denis ; Brenner, Karl-Heinz

URL: http://www.dgao-proceedings.de/download/106/106_b3...
Document Type: Conference or workshop publication
Year of publication: 2005
The title of a journal, publication series: DGaO-Proceedings : Wissenschaftliche Online-Zeitschrift der Deutschen Gesellschaft für angewandte Optik
ISSN: 1614-8436
Publication language: English
Institution: School of Business Informatics and Mathematics > Optoelektronik (Brenner 1999-2008)
Subject: 004 Computer science, internet
Abstract: Thick photoresist is used for realisation of high quality opto-mechanical structures. In order to achieve a higher level of integration, optical functions like deflection should be included. By inclined exposure of the resist, we fabricated bevelled structures. One application is a combined fibre mount and coupling structure.
Additional information: Online Ressource

Dieser Eintrag ist Teil der Universitätsbibliographie.

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