For high quality computer generated holograms As2S3-films are used as a real-ime phase recording material . To reach the required quality of optical interconnects it is necessary to expose the exact refractive index change for defined wave front distortions. Different methods were used, as scanning force microscopy (SFM), Mach Zehnder interferometry, confocal laser microscopy and interferometer microscopy to measure the wave front distortion on the pixel level. A computer simulation shows good agreement with the experimental results.
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