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Fabrication and Testing of planar Micro Lens Arrays by Ion Exchange Technique in Glass
Bähr, Jochen
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Krackhardt, Ulrich
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Brenner, Karl-Heinz
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Document Type:
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Conference or workshop publication
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Year of publication:
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2001
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Book title:
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Micro- and nano-optics for optical interconnection and information processing : 29 - 31 July 2001, San Diego, USA
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The title of a journal, publication series:
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Proceedings of SPIE
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Volume:
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4455
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Page range:
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281-292
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Publisher:
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Taghizadeh, Mohammad R.
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Place of publication:
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Bellingham, Wash.
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Publishing house:
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SPIE
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ISBN:
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0-8194-4169-4
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Publication language:
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English
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Institution:
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School of Business Informatics and Mathematics > Optoelektronik (Brenner)
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Subject:
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004 Computer science, internet
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Individual keywords (German):
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Mikrooptik , Wellenfrontsensor
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Keywords (English):
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micro optics , testing , wavefront sensing
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Abstract:
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The mask structured ion exchange in glass (MSI) is a powerful tool for realizing general planar phase distributions and in particular custom designed planar GRIN micro lenses with diffraction limited performance and high fill factor. For lens characterization the numerical aperture is a key parameter. However the classical geometrical definition of the N.A. disregards aberrations. Here we suggest an addition to this classical definition, which is based on diffraction limited performance. For a testing of micro lens arrays, global process parameters are assessed by interferometric measurements of a subset of the lenses. Local process variations typically result in small non-symmetric aberrations. Thes aberrations mainly lead to a lateral shift of the focus. Thus, for rapid quality control of micro lens arrays we analyze all focal positions in parallel. From the lateral deviations of the focal positions a quality criterion for each individual micro lens can be derived.
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 | Dieser Eintrag ist Teil der Universitätsbibliographie. |
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