Integrated Guiding Structures for automatic Alignment of micro optical Components

Krackhardt, Ulrich ; Brenner, Karl-Heinz

Document Type: Conference or workshop publication
Year of publication: 2001
Book title: Gradient index, miniature, and diffractive optical systems II : 2 - 3 August 2001, San Diego, USA
The title of a journal, publication series: Proceedings of SPIE
Volume: 4437
Page range: 91-98
Publisher: Suleski, Thomas J.
Place of publication: Bellingham, Wash.
Publishing house: SPIE
ISBN: 0-8194-4151-1
Publication language: English
Institution: School of Business Informatics and Mathematics > Optoelektronik (Brenner 1999-2008)
Subject: 004 Computer science, internet
Keywords (English): alignment , fabrication , guiding , integration , Micro-optics
Abstract: A novel technique for the realization of guiding structures for passive/automatic alignment is proposed. The technique is based on a recently available special photoresist. This photoresist can be processed by standard lithographic processes and shows a mechanical stability close to glass. Guiding structures may thus be realized in the same process as the functional structures on a substrate. We discuss the material behavior in terms of processing, change of shpe due to shrinking or swelling and shear stability. First results of accuracy experiments ar shown. as an example we demonstrate fiber ferrules for horizontal and for vertical mounting. We also show alignment structures for fiber/fiber coupling.

Dieser Eintrag ist Teil der Universitätsbibliographie.

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