A novel technique for the realization of guiding structures for passive/automatic alignment is proposed. The technique is based on a recently available special photoresist. This photoresist can be processed by standard lithographic processes and shows a mechanical stability close to glass. Guiding structures may thus be realized in the same process as the functional structures on a substrate. We discuss the material behavior in terms of processing, change of shpe due to shrinking or swelling and shear stability. First results of accuracy experiments ar shown. as an example we demonstrate fiber ferrules for horizontal and for vertical mounting. We also show alignment structures for fiber/fiber coupling.
Dieser Eintrag ist Teil der Universitätsbibliographie.
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